Inventor

KAWACHI TOSHIHIDE

JP5 patents

⚠️ This page may combine multiple inventors who share the name “KAWACHI TOSHIHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI ELECTRIC CORP

2 patents

US6617080B1Sep 9, 2003

Photomask, semiconductor device, and method for exposing through photomask

MITSUBISHI ELECTRIC CORP26 citations90

US5868560AFeb 9, 1999

Reticle, pattern transferred thereby, and correction method

MITSUBISHI ELECTRIC CORP37 citations90

RENESAS ELECTRONICS CORP

2 patents

US7879516B2Feb 1, 2011

Manufacturing method of semiconductor integrated circuit device

RENESAS ELECTRONICS CORP8 citations78

US8043772B2Oct 25, 2011

Manufacturing method and manufacturing system of semiconductor device

RENESAS ELECTRONICS CORP4 citations60

TOSHIBA MEMORY CORP

1 patent

US9760017B2Sep 12, 2017

Wafer lithography equipment

TOSHIBA MEMORY CORP0 citations36