Inventor
HUFF ROBERT B
US3 patents
Patents
3 patentsUS7445695B2Nov 4, 2008
Method and system for conditioning a vapor deposition target
ADVANCED ENERGY IND INC14 citations80
US10886104B2Jan 5, 2021
Adaptive plasma ignition
ADVANCED ENERGY IND INC2 citations65
US8357266B2Jan 22, 2013
Method and system for controlling a vapor deposition process
ADVANCED ENERGY IND INC0 citations48