Inventor
LAM KAI TAK
TW12 patents
Patents
12 patentsUS11768437B2Sep 26, 2023
System and method for performing extreme ultraviolet photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11392040B2Jul 19, 2022
System and method for performing extreme ultraviolet photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US11855192B2Dec 26, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12174545B2Dec 24, 2024
System and method for performing extreme ultraviolet photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12096544B2Sep 17, 2024
Lithography thermal control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11647578B2May 9, 2023
Lithography thermal control
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11282940B2Mar 22, 2022
Field effect transistors with ferroelectric dielectric materials
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12372886B2Jul 29, 2025
Acoustic particle deflection in lithography tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11822259B2Nov 21, 2023
Acoustic particle deflection in lithography tool
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US10707320B2Jul 7, 2020
Field effect transistors with ferroelectric dielectric materials
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12087714B2Sep 10, 2024
Reduction of cracks in passivation layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12432954B2Sep 30, 2025
Semiconductor device structure with fin and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48