Inventor

FARR JON C

US6 patents

⚠️ This page may combine multiple inventors who share the name “FARR JON C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

4 patents

US12165877B2Dec 10, 2024

Methods for etching a material layer for semiconductor applications

APPLIED MATERIALS INC0 citations58

US9070633B2Jun 30, 2015

Method and apparatus for high efficiency gas dissociation in inductive coupled plasma reactor

APPLIED MATERIALS INC1 citations51

US11915940B2Feb 27, 2024

Method of depositing a pre-etch protective layer

APPLIED MATERIALS INC0 citations46

US10211030B2Feb 19, 2019

Source RF power split inner coil to improve BCD and etch depth performance

APPLIED MATERIALS INC0 citations30

NANGOY ROY C

1 patent

US8753474B2Jun 17, 2014

Method and apparatus for high efficiency gas dissociation in inductive couple plasma reactor

NANGOY ROY C11 citations82

SIRAJUDDIN KHALID M

1 patent

US8158522B2Apr 17, 2012

Method of forming a deep trench in a substrate

SIRAJUDDIN KHALID M10 citations75