Inventor
PAMARTHY SHARMA V
US7 patents
⚠️ This page may combine multiple inventors who share the name “PAMARTHY SHARMA V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6979652B2Dec 27, 2005
Etching multi-shaped openings in silicon
APPLIED MATERIALS INC30 citations91
US6593244B1Jul 15, 2003
Process for etching conductors at high etch rates
APPLIED MATERIALS INC22 citations91
US6897155B2May 24, 2005
Method for etching high-aspect-ratio features
APPLIED MATERIALS INC11 citations71
US6905616B2Jun 14, 2005
Method of releasing devices from a substrate
APPLIED MATERIALS INC4 citations60
US9070633B2Jun 30, 2015
Method and apparatus for high efficiency gas dissociation in inductive coupled plasma reactor
APPLIED MATERIALS INC1 citations51