Inventor

DINSMORE ROBERT

US3 patents

⚠️ This page may combine multiple inventors who share the name “DINSMORE ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US9147558B2Sep 29, 2015

Finned shutter disk for a substrate process chamber

APPLIED MATERIALS INC2 citations59

US9269562B2Feb 23, 2016

In situ chamber clean with inert hydrogen helium mixture during wafer process

APPLIED MATERIALS INC1 citations50

TSAI CHENG-HSIUNG MATTHEW

1 patent

US9252002B2Feb 2, 2016

Two piece shutter disk assembly for a substrate process chamber

TSAI CHENG-HSIUNG MATTHEW5 citations65