Inventor
MUTA KOSHI
JP10 patents
Patents
10 patentsUS9947556B2Apr 17, 2018
Substrate cleaning apparatus, substrate cleaning method, and storage medium
TOKYO ELECTRON LTD5 citations72
US9835948B2Dec 5, 2017
Developing method, developing apparatus, and recording medium
TOKYO ELECTRON LTD2 citations66
US11031261B2Jun 8, 2021
Liquid processing apparatus
TOKYO ELECTRON LTD0 citations60
US10921713B2Feb 16, 2021
Developing method, computer-readable storage medium and developing apparatus
TOKYO ELECTRON LTD0 citations58
US10289004B2May 14, 2019
Developing apparatus, developing method and storage medium
TOKYO ELECTRON LTD0 citations51
US10120285B2Nov 6, 2018
Developing method, developing apparatus and storage medium
TOKYO ELECTRON LTD0 citations51
US9575411B2Feb 21, 2017
Developing apparatus, developing method and storage medium
TOKYO ELECTRON LTD0 citations51
US9568829B2Feb 14, 2017
Developing method, developing apparatus and storage medium
TOKYO ELECTRON LTD1 citations51
US10014190B2Jul 3, 2018
Liquid processing apparatus
TOKYO ELECTRON LTD0 citations50
US10459340B2Oct 29, 2019
Developing method, computer-readable storage medium and developing apparatus
TOKYO ELECTRON LTD0 citations48