Inventor

KAVANAGH JAMES BENEDICT

NL5 patents

Patents

5 patents

US9507907B2Nov 29, 2016

Computational wafer inspection

ASML NETHERLANDS BV18 citations91

US10579772B2Mar 3, 2020

Computational wafer inspection

ASML NETHERLANDS BV7 citations82

US9990462B2Jun 5, 2018

Computational wafer inspection

ASML NETHERLANDS BV8 citations82

US11080459B2Aug 3, 2021

Computational wafer inspection

ASML NETHERLANDS BV2 citations71

US12067340B2Aug 20, 2024

Computational wafer inspection

ASML NETHERLANDS BV0 citations61