Inventor
MINER STEPHEN B
US5 patents
Patents
5 patentsUS9142437B2Sep 22, 2015
System for separately handling different size FOUPs
GLOBALFOUNDRIES INC465 citations96
US9257320B2Feb 9, 2016
Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication
GLOBALFOUNDRIES INC26 citations93
US9870936B2Jan 16, 2018
Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication
GLOBALFOUNDRIES INC4 citations83
US10707108B2Jul 7, 2020
Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication
GLOBALFOUNDRIES INC1 citations72
US10593575B2Mar 17, 2020
System and method for monitoring wafer handling and a wafer handling machine
GLOBALFOUNDRIES INC3 citations68