Inventor
HUANG JIEH-CHAU
TW3 patents
Patents
3 patentsUS11764081B2Sep 19, 2023
Wafer cleaning apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations69
US11056358B2Jul 6, 2021
Wafer cleaning apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US12165887B2Dec 10, 2024
Wafer cleaning apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58