Inventor
WARD CURTIS W
US12 patents
Patents
12 patentsUS10460993B2Oct 29, 2019
Fin cut and fin trim isolation for advanced integrated circuit structure fabrication
INTEL CORP6 citations92
US10892223B2Jan 12, 2021
Advanced lithography and self-assembled devices
INTEL CORP11 citations86
US11063133B2Jul 13, 2021
Fin cut and fin trim isolation for advanced integrated circuit structure fabrication
INTEL CORP1 citations84
US10777656B2Sep 15, 2020
Fin cut and fin trim isolation for advanced integrated circuit structure fabrication
INTEL CORP3 citations84
US9893167B2Feb 13, 2018
Integration methods to fabricate internal spacers for nanowire devices
INTEL CORP9 citations82
US12218052B2Feb 4, 2025
Advanced lithography and self-assembled devices
INTEL CORP1 citations75
US11854787B2Dec 26, 2023
Advanced lithography and self-assembled devices
INTEL CORP1 citations73
US11646359B2May 9, 2023
Fin cut and fin trim isolation for advanced integrated circuit structure fabrication
INTEL CORP0 citations73
US11373950B2Jun 28, 2022
Advanced lithography and self-assembled devices
INTEL CORP1 citations73
US11145541B2Oct 12, 2021
Conductive via and metal line end fabrication and structures resulting therefrom
INTEL CORP5 citations71
US12426230B2Sep 23, 2025
Fin cut and fin trim isolation for advanced integrated circuit structure fabrication
INTEL CORP0 citations62
US12016170B2Jun 18, 2024
Fin cut and fin trim isolation for advanced integrated circuit structure fabrication
INTEL CORP0 citations62