Inventor

SHUHARA AKIRA

JP3 patents

Patents

3 patents

US4916311AApr 10, 1990

Ion beaming irradiating apparatus including ion neutralizer

MITSUBISHI ELECTRIC CORP97 citations93

US4886971ADec 12, 1989

Ion beam irradiating apparatus including ion neutralizer

MITSUBISHI ELECTRIC CORP94 citations92

US5097793AMar 24, 1992

Thin film vacuum evaporation device

MITSUBISHI ELECTRIC CORP11 citations71