Inventor
MIYOSHI RISAKO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “MIYOSHI RISAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS10692744B2Jun 23, 2020
Method of inspecting gas supply system
TOKYO ELECTRON LTD2 citations71
US10692743B2Jun 23, 2020
Method of inspecting gas supply system
TOKYO ELECTRON LTD5 citations71
US10871786B2Dec 22, 2020
Substrate processing system and method of determining flow rate of gas
TOKYO ELECTRON LTD2 citations69
US10876870B2Dec 29, 2020
Method of determining flow rate of a gas in a substrate processing system
TOKYO ELECTRON LTD1 citations62
US10168049B2Jan 1, 2019
Method for preventing explosion of exhaust gas in decompression processing apparatus
TOKYO ELECTRON LTD1 citations61
US11231313B2Jan 25, 2022
Method of obtaining output flow rate of flow rate controller and method of processing workpiece
TOKYO ELECTRON LTD0 citations51
US10424466B2Sep 24, 2019
Method for inspecting shower plate of plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
US9240307B2Jan 19, 2016
Plasma processing apparatus
TOKYO ELECTRON LTD1 citations51
US10845119B2Nov 24, 2020
Method of arranging treatment process
TOKYO ELECTRON LTD0 citations41
US10788356B2Sep 29, 2020
Method of inspecting gas supply system, method of calibrating flow controller, and method of calibrating secondary reference device
TOKYO ELECTRON LTD0 citations40
US10274972B2Apr 30, 2019
Method of inspecting gas supply system
TOKYO ELECTRON LTD0 citations40
US10031007B2Jul 24, 2018
Method of calculating output flow rate of flow rate controller
TOKYO ELECTRON LTD0 citations40
US10859426B2Dec 8, 2020
Method of inspecting flow rate measuring system
TOKYO ELECTRON LTD0 citations39