Inventor

YAZAKI HIROSHI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “YAZAKI HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US10871786B2Dec 22, 2020

Substrate processing system and method of determining flow rate of gas

TOKYO ELECTRON LTD2 citations69

PANASONIC IP MAN CO LTD

1 patent

US9946948B2Apr 17, 2018

Article delivery system

PANASONIC IP MAN CO LTD3 citations67