Inventor

HSU SHAO-CHUNG

TW2 patents

Patents

2 patents

US6368761B1Apr 9, 2002

Procedure of alignment for optimal wafer exposure pattern

MACRONIX INT CO LTD16 citations80

US6799152B1Sep 28, 2004

Critical dimension statistical process control in semiconductor fabrication

MACRONIX INT CO LTD7 citations68