Inventor
OH HILARIO
US7 patents
⚠️ This page may combine multiple inventors who share the name “OH HILARIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDINGS N V
3 patentsUS6678572B1Jan 13, 2004
Recipe cascading in a wafer processing system
ASML HOLDINGS N V69 citations94
US6694218B2Feb 17, 2004
Method and apparatus for resolving conflicts in a substrate processing system
ASML HOLDINGS N V41 citations90
US6865437B1Mar 8, 2005
Robot pre-positioning in a wafer processing system
ASML HOLDINGS N V4 citations61
ASML HOLDING NV
3 patentsUS6768930B2Jul 27, 2004
Method and apparatus for resolving conflicts in a substrate processing system
ASML HOLDING NV31 citations91
US7052919B2May 30, 2006
Recipe cascading in a wafer processing system
ASML HOLDING NV13 citations82
US6952622B2Oct 4, 2005
Robot pre-positioning in a wafer processing system
ASML HOLDING NV11 citations73