Inventor
SCHILLING PAUL E
US5 patents
⚠️ This page may combine multiple inventors who share the name “SCHILLING PAUL E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS6500605B1Dec 31, 2002
Removal of photoresist and residue from substrate using supercritical carbon dioxide process
TOKYO ELECTRON LTD128 citations97
US6890853B2May 10, 2005
Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module
TOKYO ELECTRON LTD46 citations95
US7208411B2Apr 24, 2007
Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module
TOKYO ELECTRON LTD0 citations51