Inventor
SMULDERS PATRICK JOHANNES CORNELIS
NL3 patents
Patents
3 patentsUS7583357B2Sep 1, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations82
US7684010B2Mar 23, 2010
Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealing
ASML NETHERLANDS BV15 citations81
US7486384B2Feb 3, 2009
Lithographic support structure
ASML NETHERLANDS BV11 citations77