Inventor

SPANJERS FRANCISCUS ANDREAS CO

NL4 patents

Patents

4 patents

US7295283B2Nov 13, 2007

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV16 citations80

US6791664B2Sep 14, 2004

Lithographic apparatus, device manufacturing method, and device manufacturing thereby

ASML NETHERLANDS BV17 citations78

US7486384B2Feb 3, 2009

Lithographic support structure

ASML NETHERLANDS BV11 citations77

US6856376B2Feb 15, 2005

Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby

ASML NETHERLANDS BV7 citations71