Inventor
SHIDA HIROYUKI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “SHIDA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
3 patentsUS5815396ASep 29, 1998
Vacuum processing device and film forming device and method using same
HITACHI LTD51 citations94
US5707500AJan 13, 1998
Vacuum processing equipment, film coating equipment and deposition method
HITACHI LTD45 citations91
US6224676B1May 1, 2001
Gas supply apparatus and film forming apparatus
HITACHI LTD18 citations80