Inventor
ROWELL KEVIN
US11 patents
Patents
11 patentsUS10162266B2Dec 25, 2018
Photoresist pattern trimming methods
ROHM & HAAS ELECT MAT2 citations72
US9869933B2Jan 16, 2018
Pattern trimming methods
ROHM & HAAS ELECT MAT3 citations72
US9696629B2Jul 4, 2017
Photoresist pattern trimming compositions and methods
ROHM & HAAS ELECT MAT2 citations72
US9541834B2Jan 10, 2017
Ionic thermal acid generators for low temperature applications
ROHM & HAAS ELECT MAT3 citations72
US11506981B2Nov 22, 2022
Photoresist pattern trimming compositions and pattern formation methods
ROHM & HAAS ELECT MAT1 citations61
US11754927B2Sep 12, 2023
Photoresist pattern trimming compositions and pattern formation methods
ROHM & HAAS ELECT MAT0 citations58
US10684549B2Jun 16, 2020
Pattern-formation methods
ROHM & HAAS ELECT MAT0 citations51
US10007179B2Jun 26, 2018
Thermal acid generators and photoresist pattern trimming compositions and methods
ROHM & HAAS ELECT MAT0 citations51
US9760011B1Sep 12, 2017
Pattern trimming compositions and methods
ROHM & HAAS ELECT MAT1 citations51
US9448486B2Sep 20, 2016
Photoresist pattern trimming compositions and methods
ROHM & HAAS ELECT MAT1 citations48
US10241407B2Mar 26, 2019
Thermal acid generators and photoresist pattern trimming compositions and methods
ROHM & HAAS ELECT MAT0 citations41