Inventor
YAQOOB FAISAL
US6 patents
⚠️ This page may combine multiple inventors who share the name “YAQOOB FAISAL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS9425041B2Aug 23, 2016
Isotropic atomic layer etch for silicon oxides using no activation
LAM RES CORP143 citations97
US11469079B2Oct 11, 2022
Ultrahigh selective nitride etch to form FinFET devices
LAM RES CORP3 citations71
US10679868B2Jun 9, 2020
Isotropic atomic layer etch for silicon oxides using no activation
LAM RES CORP3 citations71
US9911620B2Mar 6, 2018
Method for achieving ultra-high selectivity while etching silicon nitride
LAM RES CORP3 citations71
US10192751B2Jan 29, 2019
Systems and methods for ultrahigh selective nitride etch
LAM RES CORP1 citations61