Inventor
CHUNG HAN-CHIH
TW4 patents
Patents
4 patentsUS10295909B2May 21, 2019
Edge-exposure tool with an ultraviolet (UV) light emitting diode (LED)
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations80
US10739682B2Aug 11, 2020
Edge-exposure tool with an ultraviolet (UV) light emitting diode (LED)
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10509323B2Dec 17, 2019
Edge-exposure tool with an ultraviolet (UV) light emitting diode (LED)
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10115581B2Oct 30, 2018
Removal of particles on back side of wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations30