Inventor

SCHUMAKER PHILIP D

US23 patents

⚠️ This page may combine multiple inventors who share the name “SCHUMAKER PHILIP D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHUMAKER PHILIP D

MOLECULAR IMPRINTS INC

Imprint lithography template having opaque alignment marks

Interferometric analysis method for the manufacture of nano-scale devices

Interferometric analysis for the manufacture of nano-scale devices

Method for detecting a particle in a nanoimprint lithography system

Interferometric analysis method for the manufacture of nano-scale devices

System to transfer a template transfer body between a motion stage and a docking plate

Enhanced multi channel alignment

Optical system for use in stage control

CANON KK

Imprint apparatus and method of manufacturing article

Imprint apparatus, imprint method, and method of manufacturing article

System and methods for nanoimprint lithography

Nanoimprint lithography with a six degrees-of-freedom imprint head module

Optical system for use in stage control

SCHUMAKER PHILIP D

Drop pattern generation for imprint lithography

Robust optimization to generate drop patterns in imprint lithography which are tolerant of variations in drop volume and drop placement

Drop pattern generation with edge weighting

SREENIVASAN SIDLGATA V

Tessellated patterns in imprint lithography

Patterning a plurality of fields on a substrate to compensate for differing evaporation times

PDF SOLUTIONS INC

Efficient method for modeling and simulation of the impact of local and global variation on integrated circuits

CANON NANOTECHNOLOGIES INC

High throughput imprint based on contact line motion tracking control

CHOI BYUNG-JIN

Alignment for edge field nano-imprinting

LU XIAOMING

High throughput imprint based on contact line motion tracking control

JONES CHRISTOPHER ELLIS

Residual layer thickness measurement and correction