Inventor
SAKAUE TAKASHI
5 patents
⚠️ This page may combine multiple inventors who share the name “SAKAUE TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS9724906B2Aug 8, 2017
Delamination method, delamination device, and delamination system
TOKYO ELECTRON LTD9 citations81
US12528153B2Jan 20, 2026
Processing method and processing apparatus
TOKYO ELECTRON LTD0 citations47
US9613797B2Apr 4, 2017
Cleaning device, peeling system, cleaning method and computer-readable storage medium
TOKYO ELECTRON LTD0 citations42