Inventor
FARNAAM MOHAMMAD
US5 patents
Patents
5 patentsUS4960732AOct 2, 1990
Contact plug and interconnect employing a barrier lining and a backfilled conductor material
ADVANCED MICRO DEVICES INC157 citations98
US4884123ANov 28, 1989
Contact plug and interconnect employing a barrier lining and a backfilled conductor material
ADVANCED MICRO DEVICES INC260 citations98
US4847674AJul 11, 1989
High speed interconnect system with refractory non-dogbone contacts and an active electromigration suppression mechanism
ADVANCED MICRO DEVICES INC236 citations97
US4962060AOct 9, 1990
Making a high speed interconnect system with refractory non-dogbone contacts and an active electromigration suppression mechanism
ADVANCED MICRO DEVICES INC67 citations94
US4820611AApr 11, 1989
Titanium nitride as an antireflection coating on highly reflective layers for photolithography
ADVANCED MICRO DEVICES INC70 citations91