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Inventor
MASHIRO SUPIKA
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “MASHIRO SUPIKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ANELVA CORP
2 patents
US5552955A
Sep 3, 1996
Substrate removal method and mechanism for effecting the method
ANELVA CORP
20 citations
89
US5699223A
Dec 16, 1997
Method of removing substrate and apparatus for controlling applied voltage
ANELVA CORP
47 citations
88
ASAKAWA TERUO
1 patent
US9696711B2
Jul 4, 2017
Processing instructing device, processing instructing method, computer program and processing device
ASAKAWA TERUO
1 citations
41