Inventor
BABICH INNA V
US7 patents
Patents
7 patentsUS6685853B1Feb 3, 2004
Energy sensitive electrically conductive admixtures, uses thereof, methods of fabrication and structures fabricated therewith
IBM79 citations97
US6197896B1Mar 6, 2001
Graft polymers and use thereof
IBM45 citations92
US6132644AOct 17, 2000
Energy sensitive electrically conductive admixtures
IBM28 citations92
US6251569B1Jun 26, 2001
Forming a pattern of a negative photoresist
IBM23 citations91
US6348299B1Feb 19, 2002
RIE etch resistant nonchemically amplified resist composition and use thereof
IBM14 citations83
US6617086B2Sep 9, 2003
Forming a pattern of a negative photoresist
IBM5 citations72
US5185056AFeb 9, 1993
Method and apparatus for etching semiconductor wafers and developing resists
IBM19 citations71