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Inventor
SAITOH SHINOBU
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “SAITOH SHINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
2 patents
US6100201A
Aug 8, 2000
Method of forming a semiconductor memory device
NEC CORP
22 citations
90
US6972453B2
Dec 6, 2005
Method of manufacturing a semiconductor device capable of etching a multi-layer of organic films at a high selectivity
NEC CORP
14 citations
82
NEC COPORATION
1 patent
US7482694B2
Jan 27, 2009
Semiconductor device and its manufacturing method
NEC COPORATION
1 citations
48