Inventor
CARCASI MICHAEL
US21 patents
Patents
21 patentsUS10809620B1Oct 20, 2020
Systems and methods for developer drain line monitoring
TOKYO ELECTRON LTD8 citations82
US12123778B2Oct 22, 2024
Thermal imaging sensor for integration into track system
TOKYO ELECTRON LTD2 citations72
US10429745B2Oct 1, 2019
Photo-sensitized chemically amplified resist (PS-CAR) simulation
TOKYO ELECTRON LTD3 citations72
US10048594B2Aug 14, 2018
Photo-sensitized chemically amplified resist (PS-CAR) model calibration
TOKYO ELECTRON LTD5 citations69
US11163236B2Nov 2, 2021
Method and process for stochastic driven detectivity healing
TOKYO ELECTRON LTD2 citations68
US11339733B2May 24, 2022
Systems and methods to monitor particulate accumulation for bake chamber cleaning
TOKYO ELECTRON LTD0 citations62
US11998945B2Jun 4, 2024
Methods and systems to monitor, control, and synchronize dispense systems
TOKYO ELECTRON LTD0 citations61
US11637031B2Apr 25, 2023
Systems and methods for spin process video analysis during substrate processing
TOKYO ELECTRON LTD0 citations61
US11624607B2Apr 11, 2023
Hardware improvements and methods for the analysis of a spinning reflective substrates
TOKYO ELECTRON LTD0 citations61
US11474028B2Oct 18, 2022
Systems and methods for monitoring one or more characteristics of a substrate
TOKYO ELECTRON LTD0 citations61
US11168978B2Nov 9, 2021
Hardware improvements and methods for the analysis of a spinning reflective substrates
TOKYO ELECTRON LTD0 citations61
US12226796B2Feb 18, 2025
Bath systems and methods thereof
TOKYO ELECTRON LTD0 citations60
US11738363B2Aug 29, 2023
Bath systems and methods thereof
TOKYO ELECTRON LTD1 citations60
US11276157B2Mar 15, 2022
Systems and methods for automated video analysis detection techniques for substrate process
TOKYO ELECTRON LTD0 citations60
US11262657B2Mar 1, 2022
System and method of planarization control using a cross-linkable material
TOKYO ELECTRON LTD0 citations60
US7479463B2Jan 20, 2009
Method for heating a chemically amplified resist layer carried on a rotating substrate
TOKYO ELECTRON LTD5 citations60
US11703459B2Jul 18, 2023
System and method to calibrate a plurality of wafer inspection system (WIS) modules
TOKYO ELECTRON LTD0 citations51
US9612534B2Apr 4, 2017
Exposure dose homogenization through rotation, translation, and variable processing conditions
TOKYO ELECTRON LTD1 citations50
US12488452B2Dec 2, 2025
Wafer bath imaging
TOKYO ELECTRON LTD0 citations49
US12424467B2Sep 23, 2025
Systems and methods for determining a localized fluid velocity on a spinning substrate by tracking movement of a tracer across the spinning substrate
TOKYO ELECTRON LTD0 citations44
US9978618B2May 22, 2018
Hot plate with programmable array of lift devices for multi-bake process optimization
TOKYO ELECTRON LTD0 citations34