Inventor

DELGADO GIL

US2 patents

Patents

2 patents

US7705331B1Apr 27, 2010

Methods and systems for providing illumination of a specimen for a process performed on the specimen

KLA TENCOR TECH CORP157 citations94

US7138640B1Nov 21, 2006

Method and apparatus for protecting surfaces of optical components

KLA TENCOR TECH CORP145 citations94