Inventor
TANG XINGYUAN
US9 patents
Patents
9 patentsUS7704894B1Apr 27, 2010
Method of eliminating small bin defects in high throughput TEOS films
NOVELLUS SYSTEMS INC50 citations96
US7282438B1Oct 16, 2007
Low-k SiC copper diffusion barrier films
NOVELLUS SYSTEMS INC53 citations95
US6855645B2Feb 15, 2005
Silicon carbide having low dielectric constant
NOVELLUS SYSTEMS INC61 citations95
US7968436B1Jun 28, 2011
Low-K SiC copper diffusion barrier films
NOVELLUS SYSTEMS INC15 citations92
US7573061B1Aug 11, 2009
Low-k SiC copper diffusion barrier films
NOVELLUS SYSTEMS INC24 citations92
US7341761B1Mar 11, 2008
Methods for producing low-k CDO films
NOVELLUS SYSTEMS INC17 citations92
US6777349B2Aug 17, 2004
Hermetic silicon carbide
NOVELLUS SYSTEMS INC28 citations87
US7737525B1Jun 15, 2010
Method for producing low-K CDO films
NOVELLUS SYSTEMS INC9 citations83
US8034725B1Oct 11, 2011
Method of eliminating small bin defects in high throughput TEOS films
NOVELLUS SYSTEMS INC5 citations61