Inventor
LIN CHUNG HAN
US7 patents
⚠️ This page may combine multiple inventors who share the name “LIN CHUNG HAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
COMPAL ELECTRONICS INC
3 patentsTAIWAN SEMICONDUCTOR MFG CO LTD
2 patentsUS9460957B2Oct 4, 2016
Method and structure for nitrogen-doped shallow-trench isolation dielectric
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US10804083B2Oct 13, 2020
Cathode assembly, physical vapor deposition system, and method for physical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations39