Inventor
ENGELBRECHT LOTHAR
DE8 patents
Patents
8 patentsUS11180719B2Nov 23, 2021
Use of compositions comprising a siloxane-type additive for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below
BASF SE2 citations68
US10584263B2Mar 10, 2020
Aqueous polymer-silicon oil hybrid composition
BASF SE4 citations68
US12146125B2Nov 19, 2024
Use of compositions comprising a solvent mixture for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below
BASF SE0 citations56
US10851210B2Dec 1, 2020
Process for preparing polyalkylene ether-modified polysiloxanes and use thereof
BASF SE0 citations49
US10752736B2Aug 25, 2020
Process for preparing polyalkylene ether-modified polysiloxanes and use thereof
BASF SE0 citations49
US9944786B2Apr 17, 2018
Method to lower the dynamic surface tension of a composition
BASF SE0 citations49
US9587105B2Mar 7, 2017
Fluorinated acrylate block copolymers with low dynamic surface tension
BASF SE0 citations49
US10301434B2May 28, 2019
Block copolymers having a polydimethylsiloxane block
BASF SE0 citations39