Inventor
LITTAU KARL A
US46 patents
⚠️ This page may combine multiple inventors who share the name “LITTAU KARL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PALO ALTO RES CT INC
20 patentsUS7574787B2Aug 18, 2009
Methods to make piezoelectric ceramic thick film array and single elements with a reusable single layer substrate structure
PALO ALTO RES CT INC40 citations96
US9819040B2Nov 14, 2017
Printed fuel cell with integrated gas channels
PALO ALTO RES CT INC21 citations94
US7833808B2Nov 16, 2010
Methods for forming multiple-layer electrode structures for silicon photovoltaic cells
PALO ALTO RES CT INC34 citations93
US7290336B2Nov 6, 2007
Method of fabricating an array of multi-electroded piezoelectric transducers for piezoelectric diaphragm structures
PALO ALTO RES CT INC27 citations93
US7234214B2Jun 26, 2007
Methods for making thick film elements
PALO ALTO RES CT INC22 citations92
US7118990B1Oct 10, 2006
Methods for making large dimension, flexible piezoelectric ceramic tapes
PALO ALTO RES CT INC42 citations92
US7089635B2Aug 15, 2006
Methods to make piezoelectric ceramic thick film arrays and elements
PALO ALTO RES CT INC18 citations92
US7091650B2Aug 15, 2006
Piezoelectric ceramic thick film element, array of elements, and devices
PALO ALTO RES CT INC23 citations92
US6964201B2Nov 15, 2005
Large dimension, flexible piezoelectric ceramic tapes
PALO ALTO RES CT INC42 citations92
US7763794B2Jul 27, 2010
Heterojunction photovoltaic cell
PALO ALTO RES CT INC18 citations84
US6924584B2Aug 2, 2005
Piezoelectric transducers utilizing sub-diaphragms
PALO ALTO RES CT INC14 citations84
US7176600B2Feb 13, 2007
Poling system for piezoelectric diaphragm structures
PALO ALTO RES CT INC7 citations74
US6987348B2Jan 17, 2006
Piezoelectric transducers
PALO ALTO RES CT INC8 citations74
US6967431B2Nov 22, 2005
Piezoelectric transducers and methods of manufacture
PALO ALTO RES CT INC7 citations74
US7084555B2Aug 1, 2006
Piezoelectric diaphragm structure with outer edge electrode
PALO ALTO RES CT INC10 citations72
US7053532B2May 30, 2006
Radially poled piezoelectric diaphragm structures
PALO ALTO RES CT INC5 citations63
US7901130B2Mar 8, 2011
Method and apparatus for calibrating a thermistor
PALO ALTO RES CT INC3 citations62
US7572051B2Aug 11, 2009
Method and apparatus for calibrating a thermistor
PALO ALTO RES CT INC4 citations62
US7445315B2Nov 4, 2008
Thin film and thick film heater and control architecture for a liquid drop ejector
PALO ALTO RES CT INC5 citations58
US8029599B2Oct 4, 2011
Separating gas using immobilized buffers
PALO ALTO RES CT INC0 citations52
APPLIED MATERIALS INC
15 patentsUS5856240AJan 5, 1999
Chemical vapor deposition of a thin film onto a substrate
APPLIED MATERIALS INC275 citations99
US5766365AJun 16, 1998
Removable ring for controlling edge deposition in substrate processing apparatus
APPLIED MATERIALS INC435 citations99
US5516367AMay 14, 1996
Chemical vapor deposition chamber with a purge guide
APPLIED MATERIALS INC397 citations99
US6461435B1Oct 8, 2002
Showerhead with reduced contact area
APPLIED MATERIALS INC600 citations98
US5888304AMar 30, 1999
Heater with shadow ring and purge above wafer surface
APPLIED MATERIALS INC374 citations98
US5326725AJul 5, 1994
Clamping ring and susceptor therefor
APPLIED MATERIALS INC166 citations98
US5989999ANov 23, 1999
Construction of a tantalum nitride film on a semiconductor wafer
APPLIED MATERIALS INC100 citations97
US7709385B2May 4, 2010
Method for depositing tungsten-containing layers by vapor deposition techniques
APPLIED MATERIALS INC33 citations96
US7465665B2Dec 16, 2008
Method for depositing tungsten-containing layers by vapor deposition techniques
APPLIED MATERIALS INC43 citations96
US7101795B1Sep 5, 2006
Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer
APPLIED MATERIALS INC50 citations96
US6071572AJun 6, 2000
Forming tin thin films using remote activated specie generation
APPLIED MATERIALS INC467 citations96
US6231674B1May 15, 2001
Wafer edge deposition elimination
APPLIED MATERIALS INC53 citations95
US6033480AMar 7, 2000
Wafer edge deposition elimination
APPLIED MATERIALS INC51 citations95
US7220673B2May 22, 2007
Method for depositing tungsten-containing layers by vapor deposition techniques
APPLIED MATERIALS INC29 citations92
US6291343B1Sep 18, 2001
Plasma annealing of substrates to improve adhesion
APPLIED MATERIALS INC45 citations92
LITTAU KARL A
4 patentsUS8075789B1Dec 13, 2011
Remote plasma cleaning source having reduced reactivity with a substrate processing chamber
LITTAU KARL A36 citations89
US8535502B2Sep 17, 2013
System and method for recovery of CO2 by aqueous carbonate flue gas capture and high efficiency bipolar membrane electrodialysis
LITTAU KARL A12 citations83
US8156725B2Apr 17, 2012
CO2 capture during compressed air energy storage
LITTAU KARL A6 citations67
US8389165B2Mar 5, 2013
Printed fuel cell with integrated gas channels
LITTAU KARL A2 citations62