Inventor
BURK YENI
DE7 patents
⚠️ This page may combine multiple inventors who share the name “BURK YENI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BASF SE
6 patentsUS11180719B2Nov 23, 2021
Use of compositions comprising a siloxane-type additive for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below
BASF SE2 citations68
US11970647B2Apr 30, 2024
Composition, its use and a process for selectively etching silicon-germanium material
BASF SE1 citations57
US12146125B2Nov 19, 2024
Use of compositions comprising a solvent mixture for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below
BASF SE0 citations56
US11742197B2Aug 29, 2023
Cleavable additives for use in a method of making a semiconductor substrate
BASF SE0 citations50
US11674048B2Jun 13, 2023
Aqueous polymer compositions for flexible roof coatings
BASF SE0 citations49
US10336912B2Jul 2, 2019
Methods for producing and using aqueous polyurethane/polyacrylate hybrid dispersions and use of said aqueous polyurethane/polyacrylate hybrid dispersions in coating agents
BASF SE0 citations37