Inventor

MARGESON CHRISTOPHER

US3 patents

⚠️ This page may combine multiple inventors who share the name “MARGESON CHRISTOPHER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HASHEMI FARDAD A

1 patent

US8441615B2May 14, 2013

System for isolating an exposure apparatus

HASHEMI FARDAD A7 citations74

NIKON CORP

1 patent

US10371920B2Aug 6, 2019

Mirror assembly with heat transfer mechanism

NIKON CORP0 citations32

MARGESON CHRISTOPHER

1 patent

US9519229B2Dec 13, 2016

Apparatus and methods for inhibiting immersion liquid from flowing below a sustrate

MARGESON CHRISTOPHER0 citations25