Inventor
TSUCHIYAMA MASASHI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “TSUCHIYAMA MASASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS10838311B2Nov 17, 2020
Coating and developing apparatus and coating and developing method
TOKYO ELECTRON LTD7 citations81
US11664254B2May 30, 2023
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD4 citations74
US12198961B2Jan 14, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations62
US11869789B2Jan 9, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations62
US12554205B2Feb 17, 2026
Substrate treatment system and substrate treatment method
TOKYO ELECTRON LTD0 citations51
US11211278B2Dec 28, 2021
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations51
US12391472B2Aug 19, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50
US11971661B2Apr 30, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50
US11199785B2Dec 14, 2021
Coating and developing apparatus and coating and developing method
TOKYO ELECTRON LTD0 citations47
US11079691B2Aug 3, 2021
Coating and developing apparatus and coating and developing method
TOKYO ELECTRON LTD0 citations47