Inventor

YOO MING-FENG

TW2 patents

⚠️ This page may combine multiple inventors who share the name “YOO MING-FENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US9698030B2Jul 4, 2017

Temperature controlled loadlock chamber

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48

LIN CHUN-HSIEN

1 patent

US8905124B2Dec 9, 2014

Temperature controlled loadlock chamber

LIN CHUN-HSIEN1 citations48