Inventor
VAN DER BURGT MAARTEN
BE4 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER BURGT MAARTEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS10634487B2Apr 28, 2020
Method and system for optical three dimensional topography measurement
KLA TENCOR CORP11 citations83
US9886764B2Feb 6, 2018
Image acquisition system, image acquisition method, and inspection system
KLA TENCOR CORP2 citations71
US11287248B2Mar 29, 2022
Method and system for optical three dimensional topography measurement
KLA TENCOR CORP0 citations60