Inventor
YANG CHUNE-TE
TW4 patents
Patents
4 patentsUS12230517B2Feb 18, 2025
Exhaust system and process equipment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11348811B2May 31, 2022
Thermal chamber exhaust structure and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10366909B2Jul 30, 2019
Thermal chamber exhaust structure and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US9570334B2Feb 14, 2017
Method and system for positioning wafer in semiconductor manufacturing fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations42