Inventor
TOKUHISA AKIRA
JP24 patents
⚠️ This page may combine multiple inventors who share the name “TOKUHISA AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
13 patentsUS7623557B2Nov 24, 2009
Wavelength converting optical system, laser light source, exposure apparatus, mask examining apparatus, and macromolecular crystal lens machining device
NIKON CORP23 citations90
US7339961B2Mar 4, 2008
Wavelength converting optical system, laser light source, exposure apparatus, device for inspecting object of inspection, and polymer crystal working apparatus
NIKON CORP25 citations89
US11757247B2Sep 12, 2023
Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device
NIKON CORP1 citations72
US9608400B2Mar 28, 2017
Laser device, and exposure device and inspection device provided with laser device
NIKON CORP3 citations72
US11867621B2Jan 9, 2024
Terahertz light detector and terahertz measurement device
NIKON CORP1 citations62
US11303091B2Apr 12, 2022
Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device
NIKON CORP0 citations62
US7397598B2Jul 8, 2008
Light source unit and light irradiation unit
NIKON CORP3 citations62
US7298546B2Nov 20, 2007
Ultraviolet light source, laser treatment apparatus comprising ultraviolet light source, and exposure apparatus comprising ultraviolet light source
NIKON CORP3 citations62
US11366070B2Jun 21, 2022
Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device
NIKON CORP0 citations51
US10559937B2Feb 11, 2020
Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device
NIKON CORP0 citations51
US10044160B2Aug 7, 2018
Pulsed light generating method, pulse laser apparatus, exposure apparatus having pulse laser apparatus, and inspection apparatus having pulse laser apparatus
NIKON CORP1 citations51
US7974320B2Jul 5, 2011
Method for having laser light source in standby status
NIKON CORP0 citations51
US9383653B2Jul 5, 2016
Ultraviolet laser device, and exposure device and inspection device provided with ultraviolet laser device
NIKON CORP0 citations41
TOKUHISA AKIRA
6 patentsUS8780946B2Jul 15, 2014
Ultraviolet laser device
TOKUHISA AKIRA5 citations71
US8988768B2Mar 24, 2015
Laser device
TOKUHISA AKIRA3 citations61
US8792083B2Jul 29, 2014
Seed light generation device, light source device, adjustment method thereof, light irradiation device, exposure device, and device manufacturing method
TOKUHISA AKIRA1 citations50
US8542436B2Sep 24, 2013
Optical fiber amplifier, light source device, exposure device, object inspection device, and treatment device
TOKUHISA AKIRA0 citations50
US9083151B2Jul 14, 2015
Method for having laser light source in standby status
TOKUHISA AKIRA1 citations49
US9172204B2Oct 27, 2015
Method for adjusting electro-optic modulator in laser device, and laser device
TOKUHISA AKIRA0 citations39
TAKADA YASUTOSHI
2 patentsUS9160132B2Oct 13, 2015
Laser apparatus, light therapy apparatus, exposure apparatus, device manufacturing method, and object inspection apparatus
TAKADA YASUTOSHI3 citations58
US9153934B2Oct 6, 2015
Laser apparatus, light therapy apparatus, exposure apparatus, device manufacturing method, and object inspection apparatus
TAKADA YASUTOSHI1 citations47