Inventor
YURKAS JOHN J
US16 patents
⚠️ This page may combine multiple inventors who share the name “YURKAS JOHN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
14 patentsUS6107199AAug 22, 2000
Method for improving the morphology of refractory metal thin films
IBM267 citations94
US7067422B2Jun 27, 2006
Method of forming a tantalum-containing gate electrode structure
IBM23 citations92
US6924223B2Aug 2, 2005
Method of forming a metal layer using an intermittent precursor gas flow process
IBM32 citations91
US6452276B1Sep 17, 2002
Ultra thin, single phase, diffusion barrier for metal conductors
IBM38 citations91
US6238737B1May 29, 2001
Method for protecting refractory metal thin film requiring high temperature processing in an oxidizing atmosphere and structure formed thereby
IBM14 citations74
US6984415B2Jan 10, 2006
Delivery systems for gases for gases via the sublimation of solid precursors
IBM7 citations71
US10141528B1Nov 27, 2018
Enhancing drive current and increasing device yield in n-type carbon nanotube field effect transistors
IBM0 citations52
US10141529B1Nov 27, 2018
Enhancing drive current and increasing device yield in N-type carbon nanotube field effect transistors
IBM0 citations52
US7749802B2Jul 6, 2010
Process for chemical vapor deposition of materials with via filling capability and structure formed thereby
IBM1 citations52
US7439180B2Oct 21, 2008
Dispenser system for atomic beam assisted metal organic chemical vapor deposition (MOCVD)
IBM1 citations52
US6579614B2Jun 17, 2003
Structure having refractory metal film on a substrate
IBM1 citations52
US7863083B2Jan 4, 2011
High temperature processing compatible metal gate electrode for pFETS and methods for fabrication
IBM1 citations51
US7820474B2Oct 26, 2010
Metal catalyzed selective deposition of materials including germanium and antimony
IBM0 citations46
US7772120B2Aug 10, 2010
Chemical vapor deposition method for the incorporation of nitrogen into materials including germanium and antimony
IBM0 citations41