Inventor
OKUHARA YUMIE
JP5 patents
Patents
5 patentsUS6046345AApr 4, 2000
Barium strontium β-diketonates, processes for producing the same and processes for producing barium strontium-containing oxide dielectric films with the use of the same
KABUSHIKIKAISHA KOJUNDOKAGAKU32 citations90
US6469189B1Oct 22, 2002
Liquid double alkoxide of niobium or tantalum and alkaline earth metal, production method thereof, and production method of complex metal oxide dielectric using it
KABUSHIKIKAISHA KOJUNDOKAGAKU9 citations71
US6376692B1Apr 23, 2002
Zirconium alkoxytris (β-Diketonate), process for manufacturing the same, and liquid composition for formation of PZT film
KABUSHIKIKAISHA KOJUNDOKAGAKU6 citations71
US6872419B2Mar 29, 2005
Method or process for producing PZT films at low substrate temperatures by chemical vapor deposition
KABUSHIKIKAISHA KOJUNDOKAGAKU1 citations50
US6930177B2Aug 16, 2005
High-purity lanthanum isoproxide and a process for producing the same
KABUSHIKIKAISHA KOJUNDOKAGAKU1 citations49