Inventor
MORIYA NAOHIRO
JP9 patents
Patents
9 patentsUS6511910B2Jan 28, 2003
Method for manufacturing semiconductor devices
SEIKO EPSON CORP34 citations92
US6429493B1Aug 6, 2002
Semiconductor device and method for manufacturing semiconductor device
SEIKO EPSON CORP29 citations92
US6350685B1Feb 26, 2002
Method for manufacturing semiconductor devices
SEIKO EPSON CORP48 citations92
US6194304B1Feb 27, 2001
Semiconductor device and method of fabricating the same
SEIKO EPSON CORP36 citations92
US6144097ANov 7, 2000
Semiconductor device and method of fabricating the same
SEIKO EPSON CORP33 citations92
US6107182AAug 22, 2000
Semiconductor device and method of fabricating the same
SEIKO EPSON CORP31 citations92
US6614119B1Sep 2, 2003
Semiconductor device and method of fabricating the same
SEIKO EPSON CORP15 citations84
US6137176AOct 24, 2000
Semiconductor device and method of fabricating the same
SEIKO EPSON CORP15 citations82
US6486555B2Nov 26, 2002
Semiconductor device having a contact structure using aluminum
SEIKO EPSON CORP5 citations62