Inventor
ROSS MATTHEW F
US13 patents
⚠️ This page may combine multiple inventors who share the name “ROSS MATTHEW F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ELECTRON VISION CORP
6 patentsUS6271146B1Aug 7, 2001
Electron beam treatment of fluorinated silicate glass
ELECTRON VISION CORP61 citations95
US6207555B1Mar 27, 2001
Electron beam process during dual damascene processing
ELECTRON VISION CORP70 citations95
US6132814AOct 17, 2000
Method for curing spin-on-glass film utilizing electron beam radiation
ELECTRON VISION CORP119 citations95
US6607991B1Aug 19, 2003
Method for curing spin-on dielectric films utilizing electron beam radiation
ELECTRON VISION CORP63 citations92
US6489225B1Dec 3, 2002
Method for controlling dopant profiles and dopant activation by electron beam processing
ELECTRON VISION CORP20 citations91
US6551926B1Apr 22, 2003
Electron beam annealing of metals, alloys, nitrides and silicides
ELECTRON VISION CORP7 citations73
APPLIED MATERIALS INC
4 patentsUS6900001B2May 31, 2005
Method for modifying resist images by electron beam exposure
APPLIED MATERIALS INC28 citations92
US6753129B2Jun 22, 2004
Method and apparatus for modification of chemically amplified photoresist by electron beam exposure
APPLIED MATERIALS INC39 citations92
US6890825B2May 10, 2005
Method for controlling dopant profiles and dopant activation by electron beam processing
APPLIED MATERIALS INC6 citations72
US6989227B2Jan 24, 2006
E-beam curable resist and process for e-beam curing the resist
APPLIED MATERIALS INC6 citations63