Inventor
RICE BRYAN J
US15 patents
⚠️ This page may combine multiple inventors who share the name “RICE BRYAN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
14 patentsUS7230258B2Jun 12, 2007
Plasma-based debris mitigation for extreme ultraviolet (EUV) light source
INTEL CORP54 citations94
US7153615B2Dec 26, 2006
Extreme ultraviolet pellicle using a thin film and supportive mesh
INTEL CORP27 citations92
US7078700B2Jul 18, 2006
Optics for extreme ultraviolet lithography
INTEL CORP22 citations92
US7049614B2May 23, 2006
Electrode in a discharge produced plasma extreme ultraviolet source
INTEL CORP11 citations83
US7652272B2Jan 26, 2010
Plasma-based debris mitigation for extreme ultraviolet (EUV) light source
INTEL CORP11 citations82
US7098466B2Aug 29, 2006
Adjustable illumination source
INTEL CORP8 citations71
US6847044B2Jan 25, 2005
Electrical discharge gas plasma EUV source insulator components
INTEL CORP4 citations62
US7527920B2May 5, 2009
Active hardmask for lithographic patterning
INTEL CORP2 citations61
US7446329B2Nov 4, 2008
Erosion resistance of EUV source electrodes
INTEL CORP5 citations61
US7033739B2Apr 25, 2006
Active hardmask for lithographic patterning
INTEL CORP3 citations61
US7208747B2Apr 24, 2007
Adjustment of distance between source plasma and mirrors to change partial coherence
INTEL CORP3 citations60
US7109504B2Sep 19, 2006
Extreme ultraviolet illumination source
INTEL CORP2 citations60
US7329588B2Feb 12, 2008
Forming a reticle for extreme ultraviolet radiation and structures formed thereby
INTEL CORP0 citations52
US7567379B2Jul 28, 2009
Technique to prevent tin contamination of mirrors and electrodes in an EUV lithography system
INTEL CORP0 citations51