Inventor
STONER ROBERT
US8 patents
⚠️ This page may combine multiple inventors who share the name “STONER ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZYGO CORP
7 patentsUS7106454B2Sep 12, 2006
Profiling complex surface structures using scanning interferometry
ZYGO CORP87 citations97
US7271918B2Sep 18, 2007
Profiling complex surface structures using scanning interferometry
ZYGO CORP57 citations96
US7239398B2Jul 3, 2007
Profiling complex surface structures using height scanning interferometry
ZYGO CORP36 citations96
US7948636B2May 24, 2011
Interferometer and method for measuring characteristics of optically unresolved surface features
ZYGO CORP17 citations92
US7684049B2Mar 23, 2010
Interferometer and method for measuring characteristics of optically unresolved surface features
ZYGO CORP18 citations92
US7466429B2Dec 16, 2008
Profiling complex surface structures using scanning interferometry
ZYGO CORP14 citations92
US7889355B2Feb 15, 2011
Interferometry for lateral metrology
ZYGO CORP7 citations84