Inventor
STOEHR BRIGITTE C
US6 patents
Patents
6 patentsUS6391790B1May 21, 2002
Method and apparatus for etching photomasks
APPLIED MATERIALS INC22 citations91
US6534417B2Mar 18, 2003
Method and apparatus for etching photomasks
APPLIED MATERIALS INC7 citations72
US6960413B2Nov 1, 2005
Multi-step process for etching photomasks
APPLIED MATERIALS INC6 citations71
US7115523B2Oct 3, 2006
Method and apparatus for etching photomasks
APPLIED MATERIALS INC2 citations60
US7018934B2Mar 28, 2006
Methods and apparatus for etching metal layers on substrates
APPLIED MATERIALS INC2 citations59
US7371485B2May 13, 2008
Multi-step process for etching photomasks
APPLIED MATERIALS INC1 citations49