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Inventor
PIETSCH KATRIN
DE
2 patents
Patents
2 patents
US7948635B2
May 24, 2011
Method for determining positions of structures on a substrate
VISTEC SEMICONDUCTOR SYS GMBH
0 citations
42
US7872763B2
Jan 18, 2011
Device for measuring the position of at least one structure on a substrate
VISTEC SEMICONDUCTOR SYS GMBH
0 citations
42